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step-on-wafer lithography

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  • Wafer (electronics) — Polished 12 and 6 silicon wafers. The flat cut into the right wafer indicates its doping and crystallographic orientation (see below) …   Wikipedia

  • Nanoimprint lithography — is a method of fabricating nanometer scale patterns. It is a simple nanolithography process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes. The imprint… …   Wikipedia

  • Semiconductor device fabrication — Semiconductor manufacturing processes 10 µm 1971 3 µm 1975 1.5 µm 1982 …   Wikipedia

  • Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… …   Wikipedia

  • Elektronenstrahllithografie — Die Elektronenstrahllithografie (ESL, englisch electron beam lithography oft als e beam lithography abgekürzt) ist in der Mikro und Halbleitertechnik ein spezielles Verfahren zur Strukturierung einer Elektronenstrahl empfindlichen Schicht… …   Deutsch Wikipedia

  • Microfabrication — Synthetic detail of a micromanufactured integrated circuit through four layers of planarized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green) Microfabrication is the term that describes processes of… …   Wikipedia

  • Nerve guidance conduit — A nerve guidance conduit (also referred to as an artificial nerve conduit or artificial nerve graft, as opposed to an autograft) is an artificial means of guiding axonal regrowth to facilitate nerve regeneration and is one of several clinical… …   Wikipedia

  • Stepper (Halbleitertechnik) — Stepper (links:MA 6) und Mask Aligner (rechts: MJB3) unter photochemisch unwirksamer Beleuchtung („Gelblicht“) Ein Stepper (auch Wafer Stepper) ist in der Halbleitertechnik ein Anlagentyp bzw. ein Funktionsprinzip für die fotolithografische… …   Deutsch Wikipedia

  • Nanolithography — Part of a series of articles on Nanoelectronics Single molecule electronics …   Wikipedia

  • Mathematics and Physical Sciences — ▪ 2003 Introduction Mathematics       Mathematics in 2002 was marked by two discoveries in number theory. The first may have practical implications; the second satisfied a 150 year old curiosity.       Computer scientist Manindra Agrawal of the… …   Universalium

  • Micro contact printing — Figure 1: PDMS master is created by patterning silicon, pouring and curing the PDMS, and peeling away from the substrate …   Wikipedia

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